Design and Analysis of Phononic Crystal Reflector for Surface Acoustic Wave Resonator

被引：0
|
作者：
Liu, Kangfu [1 ,2 ,3 ]
Wang, Yuxi [1 ,2 ,3 ]
Wu, Tao [1 ,2 ,3 ,4 ]
机构：
[1] ShanghaiTech Univ, Sch Informat Sci & Technol, Shanghai, Peoples R China
[2] Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China
[3] Univ Chinese Acad Sci, Beijing, Peoples R China
[4] Shanghai Engn Res Ctr Energy Efficient & Custom A, Shanghai, Peoples R China
来源：
INTERNATIONAL ULTRASONICS SYMPOSIUM (IEEE IUS 2021) | 2021年
基金：
中国国家自然科学基金; 上海市自然科学基金;
关键词：
Surface Acoustic Wave; Pononic Crystal; Q enhanced;
D O I：
10.1109/IUS52206.2021.9593607
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
This work proposes a method to design phononic crystal (PnC) reflectors for surface acoustic wave (SAW) resonator efficiently. For a prove of concept, Rayleigh wave resonators based on 128 degrees Y Lithium Niobate (LN) with one-dimensional PnC reflectors are studied with the proposed method. The PnC shows much higher reflectivity than the traditional lambda/4 metal grating reflectors (MGRs), which is about 17x of MGRs. With only 10 pairs of reflector, the SAW resonator with optimized PnC and taper coupler exhibit a quality factor at resonant frequency (Q(s)) of 1507, while the Q(s) of resonator with traditional MGRs is only 208.
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页数：4
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