Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides

被引：0

作者：

Qian, Guang ^{[1
]}

Niu, Bin ^{[1
]}

Zhao, Wu ^{[2
]}

Gu, Xiao-Wen ^{[1
]}

Zhou, Feng-Jie ^{[1
]}

Li, Guan-Yu ^{[1
]}

Kong, Yue-Chan ^{[1
]}

Chen, Tang-Sheng ^{[1
]}

机构：

[1] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modu, Nanjing, Jiangsu, Peoples R China

[2] Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing, Peoples R China

来源：

2018 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP) | 2018年

关键词：

InP-MQW; Electro-optic modulator; Mach-Zehnder interferometer (MZI); Capacitive-loaded travelling wave electrode (CL-TWE); BANDWIDTH;

D O I：

暂无

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach-Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.

引用

页数：3

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