Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides

被引：0
|
作者：
Qian, Guang [1 ]
Niu, Bin [1 ]
Zhao, Wu [2 ]
Gu, Xiao-Wen [1 ]
Zhou, Feng-Jie [1 ]
Li, Guan-Yu [1 ]
Kong, Yue-Chan [1 ]
Chen, Tang-Sheng [1 ]
机构：
[1] Nanjing Elect Devices Inst, Sci & Technol Monolith Integrated Circuits & Modu, Nanjing, Jiangsu, Peoples R China
[2] Chinese Acad Sci, Key Lab Semicond Mat Sci, Inst Semicond, Beijing, Peoples R China
来源：
2018 ASIA COMMUNICATIONS AND PHOTONICS CONFERENCE (ACP) | 2018年
关键词：
InP-MQW; Electro-optic modulator; Mach-Zehnder interferometer (MZI); Capacitive-loaded travelling wave electrode (CL-TWE); BANDWIDTH;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach-Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.
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页数：3
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