a-Si:H TFTs patterned using laser-printed toner

被引：0
|
作者：
Gleskova, H
Wagner, S
Shen, DS
机构：
来源：
FLAT PANEL DISPLAY MATERIALS II | 1997年 / 424卷
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D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We fabricated top-gate amorphous silicon thin-film transistors (a-Si:H TFTs) on alkali-free glass foil, for the first time using laser-printed toner for the patterning of each layer. The toner for the first mask level was applied by feeding the glass foil through a laser printer, and for the following mask levels from patterns laser-printed on transfer paper. The transistors have off currents from similar to 10(-12) A to similar to 10(-11) A and on-off current ratios of similar to 10(6). Thus we have demonstrated a technology for the patterning of TFT circuits by printing.
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页码：71 / 76
页数：4
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