A perspective on lithographic materials: Past, present and future challenges.

被引：0

|

作者：

Reichmanis, E ^{[1
]}

Nalamasu, O ^{[1
]}

Houlihan, FM ^{[1
]}

机构：

[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1999年 / 217卷

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

119-PMSE

引用

收藏

页码：U425 / U425

页数：1

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