An in situ nanoindentation specimen holder for a high voltage transmission electron microscope

被引：0
|
作者：
Wall, MA [1 ]
Dahmen, U [1 ]
机构：
[1] Univ Calif Lawrence Livermore Natl Lab, Dept Chem & Mat Sci, Livermore, CA 94550 USA
来源：
MICROSCOPY RESEARCH AND TECHNIQUE | 1998年 / 42卷 / 04期
关键词：
nanoindentation; cross-section; in situ TEM;
D O I：
10.1002/(SICI)1097-0029(19980915)42:4<248::AID-JEMT3>3.0.CO;2-M
中图分类号：
R602 [外科病理学、解剖学]; R32 [人体形态学];
学科分类号：
100101 ;
摘要：
We describe in detail, the design, construction, and testing of a specimen holder that allows for the nanoindentation of surfaces while viewing in cross-section in a high voltage transmission electron microscope (TEM). This nanoindentation specimen holder, having three-axis position control of a diamond indenter in combination with micromachined specimens, allows for the first time the dynamic observation of subsurface microstructure evolution under an indenter tip. Additionally, the sample design techniques that have been developed for these procedures may eliminate the need for TEM specimen preparation for additional ex situ nanoindentation experiments. Initial experimental results from in situ indentation of Si samples in the high voltage electron microscope are reported here to demonstrate the capability of this new specimen holder. Miscrosc. Res. Tech. 42:248-254, 1998. (C) 1998 Wiley-Liss, Inc.
引用
收藏
页码：248 / 254
页数：7
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