Preface to Special Topic "Plasma Physics and Science in Current and Next Generation Semiconductor Process": Invited papers from The 8th International Conference on Microelectronics and Plasma Technology

被引：0

作者：

Lee, Hyo-Chang ^{[1
]}

机构：

[1] Korea Res Inst Stand & Sci, Daejeon 305340, South Korea

来源：

PHYSICS OF PLASMAS | 2022年 / 29卷 / 04期

关键词：

D O I：

10.1063/5.0093975

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

引用

页数：2

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