Fabrication of 5GHz band film bulk acoustic wave resonators using ZnO thin film

被引：0

作者：

Kubo, R ^{[1
]}

Fujii, H ^{[1
]}

Kawamura, H ^{[1
]}

Takeuchi, M ^{[1
]}

Inoue, K ^{[1
]}

Yoshino, Y ^{[1
]}

Makino, T ^{[1
]}

Arai, S ^{[1
]}

机构：

[1] Murata Mfg Co Ltd, Div Res & Dev, Nagaoka, Niigata, Japan

来源：

2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

We successfully fabricated 5GHz band thin film bulk acoustic wave (BAW) resonators using ZnO thin film. Two types of BAW resonators utilizing fundamental resonance and secondary harmonics, were examined. In the fundamental mode resonator, the quality factor (Q factor) and the effective electromechanical coupling coefficient (k(teff)(2)) were realized at 1000 and 6.7%, respectively. These values for the secondary mode resonator were 700 and 4.7%, respectively. Combining four fundamental mode resonators as a ladder type piezoelectric filter, the bandwidth at 3dB was achieved to be 191MHz at 4.9GHz. Even with the filter using the secondary mode resonator, the bandwidth was 130MHz at 5.2GHz.

引用

页码：166 / 169

页数：4

共 50 条

[31] Investigation of spurious resonances in thin film bulk acoustic wave resonators
Reinhardt, A
Laude, V
Solal, M
Ballandras, S
Steichen, W
2004 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-3, 2004, : 1698 - 1701
[32] Characterization of nanomechanical and piezoelectric properties of AlN thin film for thin film bulk acoustic wave resonators
Chen, Qingming
Li, Fang
Wang, Qing-Ming
MICRO (MEMS) AND NANOTECHNOLOGIES FOR SPACE APPLICATIONS, 2006, 6223
[33] Thin film bulk acoustic wave devices for applications at 5.2 GHz
Fattinger, GG
Kaitila, J
Aigner, R
Nessler, W
2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 174 - 177
[34] The fabrication of thin-film bulk acoustic wave resonators employing a ZnO/Si composite diaphragm structure using porous silicon layer etching
Kim, SH
Lee, JS
Choi, HC
Lee, YH
IEEE ELECTRON DEVICE LETTERS, 1999, 20 (03) : 113 - 115
[35] FABRICATION AND ANALYSIS OF THIN FILM LITHUM NIOBATE RESONATORS FOR 5GHz FREQUENCY AND LARGE kt2 APPLICATIONS
Yandrapalli, Soumya
Kucuk, Seniz Esra
Atakan, Buis
Plessky, Victor
Villanueva, Luis Guillermo
2021 34TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2021), 2021, : 967 - 969
[36] Imaging of acoustic fields in bulk acoustic-wave thin-film resonators
Safar, H
Kleiman, RN
Barber, BP
Gammel, PL
Pastalan, J
Huggins, H
Fetter, L
Miller, R
APPLIED PHYSICS LETTERS, 2000, 77 (01) : 136 - 138
[37] Design and Fabrication of a Film Bulk Acoustic Wave Filter for 3.0 GHz-3.2 GHz S-Band
Gao, Chao
Zheng, Yupeng
Li, Haiyang
Ren, Yuqi
Gu, Xiyu
Huang, Xiaoming
Wang, Yaxin
Qu, Yuanhang
Liu, Yan
Cai, Yao
Sun, Chengliang
SENSORS, 2024, 24 (09)
[38] 5.5 GHz film bulk acoustic wave filters using thin film transfer process for WLAN applications
Yang, Tingting
Gao, Chao
Wang, Yaxin
Lin, Binghui
Zheng, Yupeng
Liu, Yan
Lei, Cheng
Sun, Chengliang
Cai, Yao
MICROSYSTEMS & NANOENGINEERING, 2024, 10 (01):
[39] Modeling, fabrication, and structural characterization of thin film ZnO based film bulk acoustic resonator
Johar, Arun Kishor
Sharma, G. K.
Kumar, A.
Kumar, Hemant
Varma, T.
Periasamy, C.
Agarwal, A.
Boolchandani, D.
MATERIALS TODAY-PROCEEDINGS, 2021, 46 : 5716 - 5721
[40] GHz High-Q Lateral Overmoded Bulk Acoustic-Wave Resonators Using Epitaxial SiC Thin Film
Gong, Songbin
Kuo, Nai-Kuei
Piazza, Gianluca
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2012, 21 (02) : 253 - 255

← 1 2 3 4 5 →