Optical measurement of thermal deformation of multilayer optics under synchrotron radiation

被引：10
|
作者：
Revesz, P. [1 ]
Kazimirov, A. [1 ]
Bazarov, I. [1 ]
机构：
[1] Cornell Univ, CHESS, Ithaca, NY 14850 USA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2007年 / 582卷 / 01期
关键词：
synchrotron radiation; high heat-load optics; heat bump; surface profile measurement; optical metrology;
D O I：
10.1016/j.nima.2007.08.093
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An in situ optical technique to visualize surface distortions of the first monochromator crystal under synchrotron beam heat loading has been developed and applied to measure surface profiles of multilayer optics under white wiggler beam at the CHESS A2 beamline. Two identical multilaver structures deposited on Si and SiC substrates have been tested. Comparison of the reconstructed 3D heatbump profiles showed the surface distortions of the multilayer on SiC a factor of two smaller than the same multilayer on a Si substrate. (C) 2007 Elsevier B.V. All rights reserved.
引用
收藏
页码：142 / 145
页数：4
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