Two-step iterative algorithm immune to tilt shifts for phase extraction

被引：0
|
作者：
Duan, Mingliang [1 ]
Zong, Yi [1 ]
Yu, Caiyun [1 ]
Li, Jianxin [1 ]
机构：
[1] Nanjing Univ Sci & Technol, Sch Elect & Opt Engn, 200 Xiao Ling Wei, Nanjing 210094, Peoples R China
来源：
OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION XII | 2021年 / 11782卷
关键词：
Phase-shifting interferometry; Tilt shifts; Phase extraction; INTERFEROMETRY; VIBRATION; ERROR;
D O I：
10.1117/12.2592283
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A two-step iterative algorithm (TSIA) immune to tilt shifts is proposed for phase extraction in phase-shifting interfcrometty (PSI). The TSIA constructs a model of the least-squares iteration of the phase distribution and the tilt shifts based on parametric decoupling. Finally, the phase distribution is extracted via the least-squares method. The experimental results show that the PTI has high accuracy and fast iterative convergence speed for the conditions of the large amplitude of tilt shifts. closed fringes, nonuniform background and modulation.
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页数：6
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