Experimental research of the cathode region of the glow discharge in nitrogen

被引：0

作者：

Prokhorova, E. I. ^{[1
]}

Platonov, A. A. ^{[1
]}

Slyshov, A. G. ^{[1
]}

Nazarov, A. I. ^{[1
]}

机构：

[1] Petrozavodsk State Univ, 33 Lenina Ave, Petrozavodsk 185910, Russia

来源：

SCIENTIFIC TECHNICAL CONFERENCE ON LOW TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS (LTP COATINGS 2017) | 2018年 / 1058卷

关键词：

D O I：

10.1088/1742-6596/1058/1/012030

中图分类号：

O3 [力学];

学科分类号：

08 ; 0801 ;

摘要：

The main falling of the discharge tension accounts for the cathode region where the main streams of charged particles are concentrated. The research of this region is important for receiving various coverings and processing of surfaces with gas discharge. Authors have presented results of the experimental electric and optics research of the cathode regions of the glow discharge in nitrogen. The research of the potential distribution in the cathode region is conducted; distribution functions of the various electron energy groups are measured; the research of the ions energy distribution near the cathode is executed. The model of formation of the ions energy distribution near the cathode is offered. Criteria for formation of the potential hole for electrons and its influence on a power range of electrons are experimentally defined. The theoretical analysis of the received results is carried out. Nonlocal theoretical model of the cathode region of the glow discharge is offered. Comparison of the received results to an overall picture of a luminescence of the discharge is executed. The agreement of experimental data with theoretical is shown.

引用

页数：4

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