Tape casting of ferroelectric, dielectric, piezoelectric and ferromagnetic materials

被引:53
|
作者
Jantunen, H
Hu, T
Uusimäki, A
Leppävuori, S
机构
[1] Oulu Univ, Microelect Lab, FIN-90014 Oulu, Finland
[2] Oulu Univ, Phys Mat Lab, FIN-90014 Oulu, Finland
[3] Oulu Univ, EMPART, Res Grp Infotech Oulu, FIN-90014 Oulu, Finland
关键词
BST; ferromagnetic; LTCC; PZT; tape casting;
D O I
10.1016/S0955-2219(03)00552-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Tape casting is a feasible method for preparing ceramic tapes with different electrical and magnetic properties for multilayer ceramic devices. This paper describes the tape casting process for several different electroceramic materials (BST, PZT, NZF and ZSB) utilising similar organic additive and solvent systems. The properties of tapes with different ceramic compositions before and after sintering are investigated, including surface roughness, shrinkage and microstructures. The parameters affecting the casting, shrinkage, lamination, thickness and tensile strength of green tape are also presented. This enables process design for tape which can be used in devices with true integration of dielectric and piezoelectric, ferroelectric, and ferromagnetic layers in 3-dimensional multilayer structures. (C) 2003 Elsevier Ltd. All rights reserved.
引用
收藏
页码:1077 / 1081
页数:5
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