Investigation of porous silicon wetting by Raman scattering

被引:0
|
作者
Ferrara, M. A. [1 ,2 ]
Donato, M. G. [2 ]
Sirleto, L. [1 ]
Messina, G. [2 ]
Santangelo, S. [2 ]
Rendina, I. [1 ]
机构
[1] CNR, Inst Microelect & Microsyst, I-80131 Naples, Italy
[2] Univ Mediterranea, Reggio Di Calabria, Italy
关键词
porous silicon; Raman scattering; wetting phenomena;
D O I
10.1080/00387010802132391
中图分类号
O433 [光谱学];
学科分类号
0703 ; 070302 ;
摘要
Wetting phenomena in porous silicon layers are experimentally investigated by Raman scattering. The experimental results show a reversible blue-shift of Raman spectra of wetted porous silicon layers with respect to the unperturbed layers. We ascribe the shift to a compressive stress due to the increased lattice mismatch between the porous silicon layer and the bulk silicon substrate in wetting conditions.
引用
收藏
页码:174 / 178
页数:5
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