Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement

被引：0

作者：

Lenczner, M. ^{[1
]}

Yang, B. ^{[1
]}

Cogan, S. ^{[1
]}

Domas, S. ^{[1
]}

Ke, D. ^{[1
]}

Couturier, R. ^{[1
]}

Renault, D. ^{[2
]}

Koehler, B. ^{[3
]}

Janus, P. ^{[4
]}

机构：

[1] UFC CNRS UTBM ENSMM, FEMTO ST, 26 Chemin Epitaphe, F-25030 Besancon, France

[2] ODESIM, 1 Vallon Fleuri, F-25660 Morre, France

[3] Fraunhofer Inst Keram Technol & Syst IKTS, Maria Reiche Str 2, D-01109 Dresden, Germany

[4] Inst Technol Elektronowej, Al Lotnikow 32-46, PL-02669 Warsaw, Poland

来源：

2016 17TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2016年

关键词：

Scanning Thermal Microscopy; Model Parameter Calibration; Multiscale Model; Temperature Control; Control with Delay in Observation; Lock-in Amplifier; Source Estimation; CANTILEVERS; DESIGN;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In view of qualitative temperature measurement by scanning thermal microscopy, we introduce a model-based control law for a new microfabricated probe. The underlying model is the time-space two-scale electro-thermal model presented in [15], since it has the power to represent transcients of harmonic modulations. The control method accounts for an estimation of the heat source in the sample and for the delay in the lock-in filter based observation. Experiment-based model calibration is a prerequisite and is discussed in detail.

引用

页数：8

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