Measurements to Establish Process ESD Compatibility

被引：0
|
作者：
Steinman, Arnold [1 ]
Henry, Leo G. [2 ]
Hernandez, Marcos [3 ]
机构：
[1] Elect Workshop, 1321 Walnut St, Berkeley, CA 94709 USA
[2] ESD TLP Consulting Teaching & Testing, Fremont, CA 94538 USA
[3] Thermo Fisher Sci, ESD & EMC Line Prod, Fremont, CA 94538 USA
来源：
ELECTRICAL OVERSTRESS/ELECTROSTATIC DISCHARGE SYMPOSIUM PROCEEDINGS 2010 | 2010年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Currently, there are no standards for establishing equipment or process capability to handle devices of known ESD sensitivity. Correlating verification measurement tools with parameters of device testing is a first step. Measurements with a contacting high impedance voltmeter and ESD event detectors are compared to voltages and discharges of HBM and CDM testing.
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页数：8
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