Temperature-compensated structure for saw pressure sensor in very high temperature

被引：0

作者：

Hoang, Trang ^{[1
]}

Rey, Patrice ^{[1
]}

Vaudaine, Marie-Helene ^{[1
]}

Danel, Jean-Sebastien ^{[1
]}

Robert, Philippe ^{[1
]}

Benech, Philippe ^{[2
]}

Lemaitre-Auger, Pierre ^{[2
]}

机构：

[1] CEA LETI, Heterogeneous Silicon Integrat Dept, Grenoble, France

[2] INPG UJF CNRS, Inst Microelect, Electromagnetism & Photon, Grenoble, France

来源：

PROCEEDINGS OF THE 2007 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM-JOINTLY WITH THE 21ST EUROPEAN FREQUENCY AND TIME FORUM, VOLS 1-4 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper concerns the design and the analysis of a Surface Acoustic Wave (SAW) pressure sensor that is capable to work in high temperature (up to 800 degrees C) environment. Novel structures of the device are also presented for self-temperature compensation. Special attention is made on the different possible multilayer structures that could be used, the behavior of the sensor, the electromechanical coupling factor, the wave velocity as well as the required RF matching circuit. These parameters are critical issues for this special SAW sensor.

引用

页码：40 / +

页数：2

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