Thin film characterization using high frequency laser based ultrasound

被引:0
|
作者
Fiedler, CJ [1 ]
Wagner, JW [1 ]
机构
[1] USAF, Res Labs, Mat & Mfg Directorate, Div Met & Ceram, Wright Patterson AFB, OH 45433 USA
关键词
D O I
10.1063/1.58098
中图分类号
R318 [生物医学工程];
学科分类号
0831 ;
摘要
A novel delay line based interferometer has been developed for detecting the high frequency pulses of ultrasound which are used to characterize thin films. Ultrafast pulses of laser light are used to generate high frequency pulses of ultrasound which are detected using the interferometer. Ultrasonic echoes in 30 nm thick gold films which are not detectable using piezoreflective detection are detectable using this interferometer.
引用
收藏
页码:411 / 414
页数:4
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