MICROFRABRICATED MIRRORS FOR SPACE APPLICATIONS

被引：0
|
作者：
Bayat, Dara [1 ]
Ataman, Caglar [1 ]
Guldimann, Benedikt [2 ]
Lani, Sebastien [1 ]
Noell, Wilfried [1 ]
de Rooij, Nico [1 ]
机构：
[1] EPFL, IMT SAMLAB, CH-2000 Neuchatel, Switzerland
[2] Estec, ESA, Noordwijk, Netherlands
来源：
MOEMS AND MINIATURIZED SYSTEMS X | 2011年 / 7930卷
关键词：
beam steering; large mirror; magnetically actuated; electrostatically actuated; vertical comb-drive;
D O I：
10.1117/12.875038
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We report on the advances towards the design and fabrication of a system consisting or two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection angle of each of the actuators will be reviewed and compared.
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页数：9
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