共 50 条
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- [8] Novel novolak "block" copolymers for advanced i-line resists ADVANCES IN RESIST TECHNOLOGY AND PROCESSING XV, PTS 1 AND 2, 1998, 3333 : 1092 - 1102
- [9] DEVELOPMENT OF BILAYER RESISTS FOR DEEP-ULTRAVIOLET AND I-LINE APPLICATION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 3413 - 3417
- [10] PLASMA RESISTANT MODIFIED I-LINE, DEEP UV, AND E-BEAM RESISTS IEEE TRANSACTIONS ON COMPONENTS PACKAGING AND MANUFACTURING TECHNOLOGY PART A, 1995, 18 (01): : 195 - 200