High-frequency fatigue test of metallic thin films using PVDF microactuator

被引：1

作者：

Tamjidi, Nastaran ^{[1
]}

Sato, Kohei ^{[1
]}

Suzaki, Ryo ^{[1
]}

Nakamitsu, Yutaka ^{[1
]}

Sakurai, Junpei ^{[1
]}

Hata, Seiichi ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

IEICE ELECTRONICS EXPRESS | 2012年 / 9卷 / 05期

关键词：

fatigue test; thin film; S-N curve; resonance; PVDF; titanium; HIGH-CYCLE FATIGUE; TENSILE-STRENGTH; SYSTEM;

D O I：

10.1587/elex.9.403

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Novel high-frequency bending fatigue test method for sputtered metallic thin films using PVDF microactuator is proposed. Thin film titanium specimen as an example and a PVDF piezoelectric microactuator are fabricated. The specimen is stamped on this actuator and the actuator is vibrated at its resonance frequency until the specimen fails by fatigue. The stress in the specimen is calculated from vibration amplitude. By using the proposed method, the stress-fatigue life cycle (S-N) curve of the thin film titanium is obtained over 50 times faster than conventional method.

引用

页码：403 / 409

页数：7

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