Structure, Properties and Applications of Diamond Like Nanocomposite (SiOx Containing DLC) Films: A Review

被引：62
|
作者：
Meskinis, Sarunas [1 ]
Tamuleviciene, Asta [1 ]
机构：
[1] Kaunas Univ Technol, Inst Mat Sci, LT-50131 Kaunas, Lithuania
来源：
MATERIALS SCIENCE-MEDZIAGOTYRA | 2011年 / 17卷 / 04期
关键词：
SiOx containing diamond like carbon; diamond like nanocomposite films; C-H FILMS; BEAM DEPOSITED SIOX; CARBON-FILMS; TRIBOLOGICAL PROPERTIES; NANOMECHANICAL PROPERTIES; DIELECTRIC-PROPERTIES; THERMAL-CONDUCTIVITY; RAMAN-SPECTROSCOPY; OPTICAL-PROPERTIES; COATINGS;
D O I：
10.5755/j01.ms.17.4.770
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The present article reviews current situation on SiOx containing diamond like carbon (diamond like nanocomposite) films. The overview of different deposition methods and reagents used is presented; chemical composition of different diamond like nanocomposite films is described. Different models of structure of diamond like nanocomposite films are considered. Mechanical, optical, electrical properties as well as surface energy of diamond like nanocomposite films produced by different methods are reviewed and discussed. The survey of different potential and industrial applications of diamond like nanocomposite films is presented.
引用
收藏
页码：358 / 370
页数：13
相关论文
共 50 条
  • [21] Diamond Like Carbon Films Containing Si: Structure and Nonlinear Optical Properties
    Meskinis, Sarunas
    Vasiliauskas, Andrius
    Andrulevicius, Mindaugas
    Peckus, Domantas
    Tamulevicius, Sigitas
    Viskontas, Karolis
    MATERIALS, 2020, 13 (04)
  • [22] Multiwavelength Raman analysis of SiOx and N containing amorphous diamond like carbon films
    Tamuleviciene, Asta
    Kopustinskas, Vitoldas
    Niaura, Gediminas
    Meskinis, Sarunas
    Tamulevicius, Sigitas
    THIN SOLID FILMS, 2015, 581 : 86 - 91
  • [23] Superconductivity in W-containing diamond-like nanocomposite films
    Miki, Hiroyuki
    Takeno, Takanori
    Takagi, Toshiyuki
    Bozhko, Alexei
    Shupegin, Mikhail
    Onodera, Hideya
    Komiyama, Takao
    Aoyama, Takashi
    DIAMOND AND RELATED MATERIALS, 2006, 15 (11-12) : 1898 - 1901
  • [24] Optical Properties of Diamond Like Carbon Nanocomposite Thin films
    Alam, Md Shahba
    Mukherjee, Nillohit
    Ahmed, Sk. Faruque
    2ND INTERNATIONAL CONFERENCE ON CONDENSED MATTER AND APPLIED PHYSICS (ICC-2017), 2018, 1953
  • [25] Microstructure and tribological properties of SiOx/DLC films grown by PECVD
    Yang, WJ
    Sekino, T
    Shim, KB
    Niihara, K
    Auh, KH
    SURFACE & COATINGS TECHNOLOGY, 2005, 194 (01): : 128 - 135
  • [26] Diamond-like carbon (DLC) - a review
    Collins, JL
    INDUSTRIAL DIAMOND REVIEW, 1998, 58 (03): : 90 - 92
  • [27] Diamond-like carbon (DLC) - a review
    Industrial Diamond Review, 1998, 58 (578): : 90 - 92
  • [28] THE PROPERTIES OF DIAMOND - LIKE CARBON (DLC) COATINGS ON TITANIUM ALLOYS FOR BIOMEDICAL APPLICATIONS
    Madej, M.
    METALURGIJA, 2022, 61 (3-4): : 669 - 672
  • [29] Structure and properties of diamond like carbon films
    Cheng, Yuhang
    Wu, Yiping
    Chen, Jianguo
    Qiao, Xueliang
    Xie, Changsheng
    Kuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society, 1997, 25 (04): : 452 - 457
  • [30] INVESTIGATION OF THE OPTICAL AND WETTING PROPERTIES OF SiOx DOPED DLC FILMS
    Ciuciulkaite, Agne
    Tamuleviciene, Asta
    Kopustinskas, Vitoldas
    Meskinis, Sarunas
    Tamulevicius, Sigitas
    RADIATION INTERACTION WITH MATERIAL AND ITS USE IN TECHNOLOGIES 2012, 2012, : 403 - 406
12345