Error compensation for the linear error of a universal tool microscope's scale system

被引：0
|
作者：
Wang, Xiaofei [1 ]
Qiu, Zurong [1 ]
Guo, Jiaxing [2 ]
Yang, Bopei [2 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, 92 Weijing Rd, Tianjin 300072, Peoples R China
[2] Natl Inst Metrol, Beijing 100013, Peoples R China
来源：
SEVENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION | 2011年 / 8321卷
关键词：
universal tool microscope; scale linear error compensation; 1x asymmetry optical path; magnification error;
D O I：
10.1117/12.903708
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The method of linear error compensation for the magnification error generated by the 1x asymmetrical optical paths in longitudinal scale system of a universal tool microscope is presented. The micro-displacements of scale images are used for the compensation of the scale's linear error based on the properties of off-axis, out of focus, and focal length inequality. The innovative optical paths design is described in the paper. A detailed analysis of the principle of error compensation is presented. Extended formula for the magnification, defocus, and off-axis errors are also derived. The relationship between the calibration result and slope of formula is obtained to benefit the analysis and application on-site. The influence caused by the change of magnification parameters also is discussed. Indication error of one-meter longitudinal coordinate can be achieved less than 2.5 um after compensation.
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页数：8
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