Pyrolytic laser CVD of boron nitride and molybdenum

被引：5
|
作者：
Duty, C [1 ]
Johnson, R [1 ]
Bondi, S [1 ]
Lackey, WJ [1 ]
机构：
[1] Georgia Inst Technol, Woodruff Sch Mech Engn, Atlanta, GA 30332 USA
来源：
CHEMICAL VAPOR DEPOSITION | 2003年 / 9卷 / 06期
关键词：
D O I：
10.1002/cvde.200304159
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：298 / 301
页数：4
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