Microwave reflections from a vacuum ultraviolet laser produced plasma sheet

被引:29
|
作者
Kelly, KL [1 ]
Scharer, JE [1 ]
Ding, G [1 ]
Bettenhausen, M [1 ]
Kuo, SP [1 ]
机构
[1] Univ Wisconsin, Dept Elect & Comp Engn, Madison, WI 53706 USA
关键词
D O I
10.1063/1.369392
中图分类号
O59 [应用物理学];
学科分类号
摘要
A pulsed, 193 nm excimer laser is utilized to photoionize the organic gas tetrakis-dimethylamino-ethylene (TMAE). The laser ionizes a plasma sheet with a width of 7.8 cm and an adjustable thickness of 0.7-1.4 cm. The axial scale length of the plasma density is a function of TMAE neutral pressure and is typically 50 cm. X-band (10 GHz) microwaves are incident on the plasma with the electric field polarized parallel to the laser beam axis. The power reflection coefficient and the phase of the reflected signal are studied as a function of time. A monostatic homodyne detection system with a response time of 10 ns is utilized to determine the amplitude and phase of the reflected wave. The peak plasma density is n(e) approximate to X 10(13) cm(-3), sufficiently above the critical density (n(crit) = 1.2 X 10(12) cm(-3)) to produce reflections comparable to a conducting sheet placed in the same position as the plasma. A computer model is developed to interpret and optimize the plasma conditions which provide the highest backscatter and phase-stable reflection coefficient for the longest period of time. The presence of axial density gradients causes the reflected wave to be scattered through a wide angle. As the gradients relax, the backscatter reflection coefficient increases to a value of nearly 100%. The plasma density and two-body recombination coefficient are measured by means of microwave backscatter plasma reflectivity and Langmuir probes. (C) 1999 American Institute of Physics. [S0021-8979(99)08501-1].
引用
收藏
页码:63 / 68
页数:6
相关论文
共 50 条
  • [41] Optimum Laser-Produced Plasma for Extreme Ultraviolet Light Source
    Fujioka, Shinsuke
    Nishimura, Hiroaki
    Shimomura, Masashi
    Sakaguchi, Hirokazu
    Nakai, Yuki
    Aota, Tatsuya
    Shimada, Yoshinori
    Sunahara, Atsushi
    Nishihara, Katsunobu
    Miyanaga, Noriaki
    Izawa, Yasukazu
    Mima, Kunioki
    5TH INTERNATIONAL CONFERENCE ON INERTIAL FUSION SCIENCES AND APPLICATIONS (IFSA2007), 2008, 112
  • [42] Radiation properties of plasma produced by ultraviolet laser ablation of metal Cu
    Huang Qing-ju
    SPECTROSCOPY AND SPECTRAL ANALYSIS, 2008, 28 (02) : 278 - 281
  • [43] Laser-produced plasma light source for extreme ultraviolet lithography
    Shields, H
    Fornaca, SW
    Petach, MB
    Orsini, RA
    Moyer, RH
    St Pierre, RJ
    PROCEEDINGS OF THE IEEE, 2002, 90 (10) : 1689 - 1695
  • [44] ULTRAVIOLET EMISSION OF PLASMA PRODUCED BY FOCUSING OF LASER BEAM ON SOLID TARGET
    SCHWOB, JL
    BRETON, C
    SEKA, W
    MINIER, C
    PLASMA PHYSICS, 1970, 12 (04): : 217 - &
  • [45] Extreme ultraviolet source using laser-produced Li plasma
    Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori-cho, Ako-gun, Hyogo 678-1205, Japan
    IEEJ Trans. Electron. Inf. Syst., 2009, 2 (249-252+7): : 249 - 252
  • [46] Characterization of optical depth for laser produced plasma extreme ultraviolet source
    Wang, Tianze
    Hu, Zhenlin
    He, Liang
    Lin, Nan
    Leng, Yuxin
    Chen, Weibiao
    VACUUM, 2025, 231
  • [47] Vacuum ultraviolet argon excimer laser initiated by high-intensity laser-produced electrons
    Kubodera, S
    Morita, Y
    Higashiguchi, T
    Rajyaguru, C
    Sasaki, W
    XV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers Pt 1 and 2, 2005, 5777 : 574 - 577
  • [48] Development of laser-produced plasma sources for extreme ultraviolet lithography
    O'Sullivan, Gerry
    Li, Bowen
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2012, 11 (02):
  • [49] Effect of transverse magnetic field on laser produced plasma expansion into vacuum
    Bennaceur-Doumaz, D.
    Djebli, M.
    PHYSICS OF PLASMAS, 2011, 18 (08)
  • [50] Effect of plasma plume produced by vacuum laser welding on energy transmission
    Gong, Jianfeng
    Peng, Genchen
    Li, Liqun
    Xia, Hongbo
    Meng, Shenghao
    Wang, Jiming
    OPTICS AND LASER TECHNOLOGY, 2021, 136