Depth resolution and dynamic range of 18O(p,α)15N depth profiling

被引：5
|
作者：
Liu, JR
Li, YP
Chen, QY
Cui, XT
Christoffersen, R
Jacobson, A
Chu, WK [1 ]
机构：
[1] Univ Houston, Texas Ctr Supercond, Houston, TX 77204 USA
[2] Univ Houston, Mat Res Sci & Engn Ctr, Houston, TX 77204 USA
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1998年 / 136卷
关键词：
ion beam analysis; nuclear reaction analysis; NRA; oxide;
D O I：
10.1016/S0168-583X(97)00835-5
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper discusses an approach to get better depth resolution and the 2-3 mu m dynamic range needed for diffusion studies of oxygen, using O-18(p,alpha)N-15 nuclear reaction analysis (NRA). This was achieved by optimizing the experimental parameters, and using fast electronics without the absorber in front. of the detector. By energy analysis of the alpha-particles, a depth resolution of 170 to 300 Angstrom was obtained with the dynamic range varying from the surface to a depth of 3 mu m. Problems in data analysis, i.e., the cross sections and energy straggling will be discussed. Examples in depth profiling of O-18-implanted SrTiO3 single crystals and Yttrium stabilized zirconia (YSZ) single crystals annealed in O-18 at high temperature are presented. (C) 1998 Elsevier Science B.V.
引用
收藏
页码：1306 / 1311
页数：6
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