Volatile Organic Compounds Gas Sensing Properties of ZnO Nanorings

被引：9

作者：

Zhang, Shao-Lin ^{[1
]}

Cho, Bong-Hwan ^{[2
,3
]}

Yu, Joon-Boo ^{[2
,3
]}

Lim, Jeong-Ok ^{[4
]}

Byun, Hyung-Gi ^{[5
]}

Lee, Duk-Dong ^{[6
]}

Huh, Jeung-Soo ^{[1
,2
,3
]}

机构：

[1] Kyungpook Natl Univ, Dept Sensor & Display Engn, Taegu 702701, South Korea

[2] Kyungpook Natl Univ, Dept Mat Sci, Taegu 702701, South Korea

[3] Kyungpook Natl Univ, Dept Met, Taegu 702701, South Korea

[4] Kyungpook Natl Univ, Biomed Res Inst, Taegu 700422, South Korea

[5] Kangwon Natl Univ, Dept Informat & Commun, Samcheok 245711, South Korea

[6] Korea Inst Sci & Technol Informat, Taejon 305806, South Korea

来源：

SENSOR LETTERS | 2011年 / 9卷 / 02期

关键词：

ZnO Nanorings; MEMS; Gas Sensor; VOC Gas; NANORODS; SENSORS; AIR; H2S;

D O I：

10.1166/sl.2011.1628

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Hexagonal ZnO ring-like nanostructured powder was successfully synthesized by a facile sono-chemical process and the following etching treatment at room temperature without any catalysts or templates. The results indicated that the nanorings had a diameter of about 180 nm and wall thickness of about 50 nm. Nanorings gas sensor was fabricated on a silicon-based substrate with electrodes and heater prepared by MEMS process. Gas sensing measurements toward VOC gases (benzene, toluene, ethanol and acetaldehyde) indicated that the ZnO nanorings sensor possess excellent sensitivity to these gases. The promising gas sensing properties of ZnO nanorings sensor are due to the high active area and easy diffusion provided by the particular ring-like structure.

引用

页码：845 / 849

页数：5

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