Modeling and model-based control of temperature in an SThM probe

被引：0
|
作者：
Lenczner, Michel [1 ]
Yang, Bin [2 ]
Abaidi, Mohamed [2 ]
Bontempi, Alexia [3 ]
Teyssieux, Damien [3 ]
Koehler, Bernd [4 ]
Janus, Pawel [5 ]
机构：
[1] Tech Univ Belfort Montbeliard, Time & Frequency Dept, FEMTO ST, 26 Chemin Epitaphe, F-25030 Besancon, France
[2] Univ Franche Comte, Time & Frequency Dept, FEMTO ST, F-25030 Besancon, France
[3] Micronano Sci & Syst Dept, F-25030 Besancon, France
[4] Fraunhofer Inst Nondestruct Testing IZFP, Branch Lab EADQ, Saarbrucken, Germany
[5] Wroclaw Univ Technol, Inst Technol Elekt, PL-02669 Warsaw, Poland
来源：
2015 16TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2015年
关键词：
Scanning Thermal Microscopy; Multiscale Modeling; Temperature Control; HOMOGENIZATION; CONVERGENCE;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.
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页数：7
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