Growth and characterization of ZnO thin films grown by pulsed laser deposition

被引：43
|
作者：
Bae, SH
Lee, SY
Jin, BJ
Im, S
机构：
[1] Yonsei Univ, Dept Elect & Comp Engn, Seodaemoon Ku, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Met Engn, Seodaemoon Ku, Seoul 120749, South Korea
[3] Yonsei Univ, Dept Phys, Seodaemoon Ku, Seoul 120749, South Korea
来源：
APPLIED SURFACE SCIENCE | 2001年 / 169卷
基金：
新加坡国家研究基金会;
关键词：
ZnO; PLD; XRD; UV emission; PL; hall measurement;
D O I：
10.1016/S0169-4332(00)00752-2
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
ZnO thin films on (0 0 1) sapphire substrates have been deposited by pulsed laser deposition technique using a Nd:YAG laser with the wavelength of 355 nm at an oxygen pressure of 350 mTorr. In order to investigate the effect of the deposition conditions on the properties of ZnO thin films, the experiment has been performed at various substrate temperatures in the range of 200-700 degreesC. According to XRD, (0 0 2) textured ZnO films of high crystalline quality have been obtained by pulsed laser deposition technique. However, the intensity of UV emission is mostly dependent upon the stoichiometry of ZnO films, rather than the crystalline quality. (C) 2001 Elsevier Science B.V. All rights reserved,
引用
收藏
页码：525 / 528
页数：4
相关论文
共 50 条
  • [31] Ferromagnetic signature in vanadium doped ZnO thin films grown by pulsed laser deposition
    S. Karamat
    R. S. Rawat
    P. Lee
    T. L. Tan
    C. Ke
    R. Chen
    H. D. Sun
    Journal of Materials Research, 2016, 31 : 3223 - 3229
  • [32] Modulation of energy band gap of ZnO thin films grown by pulsed laser deposition
    Lee, SY
    Li, Y
    Lee, JS
    Lee, JK
    Nastasi, M
    Crooker, SA
    Jia, QX
    Kang, HS
    Kang, JS
    NEW APPLICATIONS FOR WIDE-BANDGAP SEMICONDUCTORS, 2003, 764 : 413 - 417
  • [33] Effects of Annealing Temperature on Properties of ZnO Thin Films Grown by Pulsed Laser Deposition
    ZHUANG Hui-zhao
    Semiconductor Photonics and Technology, 2007, (02) : 150 - 154
  • [34] Ferromagnetic signature in vanadium doped ZnO thin films grown by pulsed laser deposition
    Karamat, S.
    Rawat, R. S.
    Lee, P.
    Tan, T. L.
    Ke, C.
    Chen, R.
    Sun, H. D.
    JOURNAL OF MATERIALS RESEARCH, 2016, 31 (20) : 3223 - 3229
  • [35] Rapid thermal annealing of ZnO thin films grown by using pulsed laser deposition
    Song, Hooyoung
    Kim, Jae-Hoon
    Kim, Eun Kyu
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (01) : 258 - 261
  • [36] Hydrogen Plasma Treatment of ZnO Thin Films Grown by Using Pulsed Laser Deposition
    Song, Hooyoung
    Kim, Jae-Hoon
    Kim, Eun Kyu
    Ha, Jaehwan
    Hong, Jin Pyo
    Chu, Hong
    Lee, Cheon
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (05) : 2540 - 2543
  • [37] Effects of thickness variation on properties of ZnO thin films grown by pulsed laser deposition
    Myoung, JM
    Yoon, WH
    Lee, DH
    Yun, I
    Bae, SH
    Lee, SY
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (01): : 28 - 31
  • [38] Influence of the growth conditions on the transparent conductive properties of ZnO:Al thin films grown by pulsed laser deposition
    Han Jun
    Zhang Peng
    Gong Hai-Bo
    Yang Xiao-Peng
    Qiu Zhi-Wen
    Zi Min
    Cao Bing-Qiang
    ACTA PHYSICA SINICA, 2013, 62 (21)
  • [39] InGaZnO thin films grown by pulsed laser deposition
    Chen, Jiangbo
    Wang, Li
    Su, Xueqiong
    VACUUM, 2012, 86 (09) : 1313 - 1317
  • [40] Thin ZnO films produced by pulsed laser deposition
    Dikovska, AO
    Atanasov, PA
    Vasilev, C
    Dimitrov, IG
    Stoyanchov, TR
    JOURNAL OF OPTOELECTRONICS AND ADVANCED MATERIALS, 2005, 7 (03): : 1329 - 1334
12345