Improvement of Transmittance by Fabricating Broadband Subwavelength Anti-Reflection Structures for Polycarbonate

被引:6
|
作者
Jang, H. S. [2 ]
Kim, J. H. [2 ]
Kim, K. S. [3 ,4 ]
Jung, G. Y. [3 ,4 ]
Lee, J. J. [1 ]
Kim, G. H. [1 ]
机构
[1] Korea Inst Machinery & Mat, Nanomechan Syst Res Div, Taejon 305343, South Korea
[2] Daegu Gyeongbuk Inst Sci & Technol, Div Nano & Bio Technol, Taegu 704230, South Korea
[3] Gwangju Inst Sci & Technol, Dept Mat Sci & Engn, Kwangju 500712, South Korea
[4] Gwangju Inst Sci & Technol, Program Integrated Mol Syst, Kwangju 500712, South Korea
关键词
Subwavelength Anti-Reflection; Transmittance; Polycarbonate; Thermal Nano-Imprinting Lithography; Laser Interference Lithography; HOT-WATER TREATMENT; THIN-FILMS; GRATINGS; SURFACES; GLASS;
D O I
10.1166/jnn.2011.3280
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
We report on how to increase transmittance of a 0.2 mm thick polycarbonate (PC) film by periodic subwavelength anti-reflection structures in the visible spectral range. Subwavelength anti-reflection structures like moth-eyes are fabricated into the polycarbonate substrate itself by thermal nano-imprinting lithography (TH-NIL), which uses silicon stamps that have periodic structures such as gratings (lines and spaces) and pillared dots, and are fabricated by laser interference lithography (LIL) and transformer coupled plasma etching. To increase transmittance of a polycarbonate film, we control the periods and shapes of patterns, the number of patterned surfaces, and the overlapping direction of patterns that are fabricated into its surfaces. As a result of this, we show that average transmittance improves as the pattern period gets shorter and as both surfaces of the film are patterned. We also show that the spectrum range gets larger as the pattern period gets shorter and is determined by the longer pattern period in the case of designing a film to have different pattern period on its surfaces. The maximum average transmittance of a polycarbonate film increases up to approximately 6% compared to a bare sample in the 470-800 nm spectral range.
引用
收藏
页码:291 / 295
页数:5
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