Advanced thin-film materials processing in the ultra-vacuum of space

被引：2
|
作者：
Ignatiev, A [1 ]
机构：
[1] Univ Houston, Ctr Space Vacuum Epitaxy, Houston, TX 77204 USA
来源：
ACTA ASTRONAUTICA | 2001年 / 48卷 / 2-3期
基金：
美国国家航空航天局;
关键词：
D O I：
10.1016/S0094-5765(00)00148-X
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
The utilization of the vacuum of space for thin-film materials development has been pioneered by the Wake Shield Facility (WSF) program. The WSF is a 4 m diameter disc-shaped free-flying platform designed to generate an ultra-vacuum in low earth orbit (LEO) space, and to utilize that ultra-vacuum for the fabrication of thin-film materials by epitaxial growth. In the three flights of WSF, high-quality GaAs-based epitaxial thin films were grown, vacuum quality was assessed, and cooperative experiments were activated. The promising results on high-purity film growth indicate future benefits of thin-film materials fabrication in LEO for terrestrial applications in high-performance electronic devices. (C) 2001 Published by Elsevier Science Ltd.
引用
收藏
页码：115 / 120
页数：6
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