A miniaturized magnetic-field sensor system consisting of a planar fluxgate sensor and a CMOS readout circuitry

被引：39
|
作者：
GottfriedGottfried, R
Budde, W
Jahne, R
Kuck, H
Sauer, B
Ulbricht, S
Wende, U
机构：
[1] Fraunhofer Inst. Microlectron. C., D-01109 Dresden
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 54卷 / 1-3期
关键词：
magnetic-field sensors; fluxgates; thin-film sensors; signal processing; CMOS; microsystems;
D O I：
10.1016/S0924-4247(97)80001-5
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on a miniaturized magnetic-field sensor system consisting of a fluxgate sensor fabricated in CMOS-compatible planar technology and a CMOS-ASIC for sensor supply, readout and signal processing using the second-harmonic principle with a feedback loop for zero-field operation. The system exhibits a sensitivity of 9.2 +/- 0.1 mV mu T-1 for a magnetic field range of +/- 90 mu T and a temperature range of 0 to 70 degrees C. The 3 dB bandwith is 300 Hz and a noise value of 30 nT Hz(-1/2) has been estimated. Using 5 V supply voltage, the power consumption of the system is measured to be 160 mW.
引用
收藏
页码：443 / 447
页数：5
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