Fabrication and Characterization of low-loss polymeric waveguides and micro-resonators

被引：22
|
作者：
Scheuer, Jacob [1 ]
Yariv, Amnon [2 ]
机构：
[1] Tel Aviv Univ, Sch Elect Engn, Ramat Aviv, Israel
[2] CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA
来源：
JOURNAL OF THE EUROPEAN OPTICAL SOCIETY-RAPID PUBLICATIONS | 2006年 / 1卷
关键词：
Waveguides; integrated optics; optical resonators; polymers;
D O I：
10.2971/jeos.2006.06007
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We realize low loss, single-mode polymer waveguides and microring resonators in SU-8 (MichroChem) using direct E-beam lithography. We also present and demonstrate a novel and simple approach for accurately extracting the propagation loss in the waveguides as well as the coupling between the waveguide and the microring. The demonstrated approach is insensitive to the I/O coupling efficiency to the optical chip and does not require any pre-calibration of the experimental setup. [DOI:10.2971/jeos.2006.06007]
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Polymeric Whispering Gallery Mode Micro-Resonators
    Kalt, H.
    Siegle, T.
    Kraemmer, S.
    Flatae, A. M.
    Schierle, S.
    Richter, B.
    Nocentini, S.
    Parmeggiani, C.
    Zeng, H.
    Burresi, M.
    Wiersma, D. S.
    Wondimu, S. F.
    Schuch, P.
    Koos, C.
    [J]. 2016 IEEE PHOTONICS CONFERENCE (IPC), 2016, : 95 - 96
  • [2] Fabrication and optical characterization of pedestal micro-structures on DUV210 polymer: waveguides structures towards micro-resonators
    Specht, Marion
    Huby, Nolwenn
    Lhermite, Herve
    Castro-Beltran, Rigoberto
    Loas, Goulchen
    Beche, Bruno
    [J]. EUROPEAN PHYSICAL JOURNAL-APPLIED PHYSICS, 2015, 71 (01):
  • [3] Low-loss polymeric optical waveguides with 45° mirrors
    Yoshimura, R
    Hikita, M
    Tomaru, S
    Imamura, S
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1998, 37 (6B): : 3657 - 3661
  • [4] Fabrication and characterization of low-loss optical waveguides using a novel photosensitive polyimide
    Yurt, N
    Mune, K
    Naito, R
    Fukuoka, T
    Mochizuki, A
    Matsumoto, K
    Meredith, G
    Peyghambarian, N
    Jabbour, GE
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 2005, 23 (03) : 1291 - 1294
  • [5] Low-loss titanium dioxide waveguides and resonators using a dielectric lift-off fabrication process
    Evans, Christopher C.
    Liu, Chengyu
    Suntivich, Jin
    [J]. OPTICS EXPRESS, 2015, 23 (09): : 11160 - 11169
  • [6] Low-loss polymeric optical waveguides fabricated with deuterated polyfluoromethacrylate
    Yoshimura, R
    Hikita, M
    Tomaru, S
    Imamura, S
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1998, 16 (06) : 1030 - 1037
  • [7] Fabrication and characterization of parallel-coupled dual racetrack silicon micro-resonators
    Integlia, Ryan A.
    Yin, Lianghong
    Ding, Duo
    Pan, David Z.
    Gill, Douglas M.
    Song, Weiwei
    Qian, Ying
    Jiang, Wei
    [J]. SILICON PHOTONICS VII, 2012, 8266
  • [8] Fabrication and Characterization of Low-Loss Gaussian-Like Reversed Ridge Optical Waveguides
    Wei, Wei
    Lu, Xiao
    Pang, Fufei
    Wei, Heming
    Zhang, Liang
    Wang, Tingyun
    [J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 2022, 34 (12) : 649 - 652
  • [9] Mechanical characterization of magnetostrictively actuated micro-resonators
    Bourouina, T
    Garnier, A
    Fujita, H
    Hiramoto, T
    Orsier, E
    Peuzin, JC
    [J]. DESIGN, CHARACTERIZATION, AND PACKAGING FOR MEMS AND MICROELECTRONICS, 1999, 3893 : 411 - 420
  • [10] Characterization of low-loss waveguides and devices for terahertz radiation
    Rahman, B. M. Azizur
    Markides, Christos
    Uthman, Muhammad
    Quadir, Anita
    Kejalakshmy, Namassivayane
    Themistos, Christos
    [J]. OPTICAL ENGINEERING, 2014, 53 (03)
12345