Scanning capacitance microscopy using a relaxation oscillator

被引：2
|
作者：
Pahlmeyer, M. [1 ]
Hankins, A. [1 ]
Tuppan, S. [1 ]
Kim, W. J. [1 ]
机构：
[1] Seattle Univ, Dept Phys, Seattle, WA 98122 USA
来源：
AMERICAN JOURNAL OF PHYSICS | 2015年 / 83卷 / 02期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1119/1.4899045
中图分类号：
G40 [教育学];
学科分类号：
040101 ; 120403 ;
摘要：
We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of less than 50 mu m has been achieved. Our simple, low-cost system can be a valuable platform in the undergraduate laboratory, providing students with experience in microscopic imaging techniques. (C) 2015 American Association of Physics Teachers.
引用
收藏
页码：104 / 109
页数：6
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