Scanning capacitance microscopy using a relaxation oscillator

被引：2
|
作者：
Pahlmeyer, M. [1 ]
Hankins, A. [1 ]
Tuppan, S. [1 ]
Kim, W. J. [1 ]
机构：
[1] Seattle Univ, Dept Phys, Seattle, WA 98122 USA
来源：
AMERICAN JOURNAL OF PHYSICS | 2015年 / 83卷 / 02期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1119/1.4899045
中图分类号：
G40 [教育学];
学科分类号：
040101 ; 120403 ;
摘要：
We have performed scanning capacitance microscopy using a relaxation oscillator. Precision calibrations indicate a sensitivity on the order of 0.05 pF. Surface topography of metallic structures, such as machined grooves and coins, can be readily obtained either in the constant-height (non-contact) or tapping (contact) mode. Spatial resolution of less than 50 mu m has been achieved. Our simple, low-cost system can be a valuable platform in the undergraduate laboratory, providing students with experience in microscopic imaging techniques. (C) 2015 American Association of Physics Teachers.
引用
下载
收藏
页码：104 / 109
页数：6
相关论文
共 50 条
  • [1] SCANNING CAPACITANCE MICROSCOPY
    BUGG, CD
    KING, PJ
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1988, 21 (02): : 147 - 151
  • [2] SCANNING CAPACITANCE MICROSCOPY
    MATEY, JR
    BLANC, J
    JOURNAL OF APPLIED PHYSICS, 1985, 57 (05) : 1437 - 1444
  • [3] Scanning microdeformation microscopy using an electromechanical oscillator
    Vairac, P
    Cretin, B
    ACOUSTICAL IMAGING, VOL 22, 1996, 22 : 701 - 706
  • [4] Junction leakage analysis using scanning capacitance microscopy
    Tarun, AB
    Laniog, JN
    Tan, JM
    Cana, PN
    IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, 2004, 4 (01) : 46 - 49
  • [5] "Atomistic" dopant profiling using scanning capacitance microscopy
    Aghaei, Samira
    Andrei, Petru
    Hagmann, Mark
    2015 IEEE WORKSHOP ON MICROELECTRONICS AND ELECTRON DEVICES (WMED), 2015, : 16 - 19
  • [6] Limitations of a relaxation oscillator in capacitance measurements
    Liu, YL
    Nakayama, M
    Watanabe, K
    ISTM/99: 3RD INTERNATIONAL SYMPOSIUM ON TEST AND MEASUREMENT, 1999, : 506 - 509
  • [7] Limitations of a relaxation oscillator in capacitance measurements
    Liu, YL
    Chen, S
    Nakayama, M
    Watanabe, K
    IEEE TRANSACTIONS ON INSTRUMENTATION AND MEASUREMENT, 2000, 49 (05) : 980 - 983
  • [8] Theory of scanning capacitance microscopy
    Balagurov, DB
    Klyuchnik, AV
    Lozovik, YE
    PHYSICS OF THE SOLID STATE, 2000, 42 (02) : 371 - 376
  • [9] SCANNING CAPACITANCE MICROSCOPY.
    Bugg, C.D.
    King, P.J.
    1600, (21):
  • [10] Quantitative scanning capacitance microscopy
    Jaensch, S
    Schmidt, H
    Grundmann, M
    PHYSICA B-CONDENSED MATTER, 2006, 376 : 913 - 915
12345