Polyimide resists as infrared absorbing layers for radiation microsensors

被引：0
|
作者：
Ziouche, K [1 ]
Godts, P [1 ]
Leclercq, D [1 ]
机构：
[1] Univ Lille, IEMN, CNRS, UMR 8520, F-59652 Villeneuve Dascq, France
来源：
SENSORS AND MATERIALS | 2000年 / 12卷 / 08期
关键词：
microradiometer; microsensor; absorptivity; infrared; polyimide;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Data on infrared radiative and thermal properties of absorbing layers are required for the design of radiation microsensors. In this paper, we describe a method based on the measurement of the spectral transmittance of a membrane using a widely available infrared spectrometer. The spectral absorptivity and the average absorptivity are mathematically deduced from this measurement. Some curves of absorptivity spectra and average absorptivity vs the thickness of a typically distributed polyimide deposit (Ultradel(TM)) are reported.
引用
收藏
页码：445 / 454
页数：10
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