Modeling of Pulsed Direct-Current Glow Discharge

被引:2
|
作者
Du Mu [1 ]
Zheng Yaru [1 ]
Fan Yujia [1 ]
Zhang Nan [1 ]
Liu Chengsen [1 ]
Wang Dezhen [2 ]
机构
[1] Liaoning Normal Univ, Coll Phys & Elect Technol, Dalian 116029, Peoples R China
[2] Dalian Univ Technol, Sch Phys & Optoelect Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116023, Peoples R China
关键词
pulsed direct-current glow discharge; plasma processing; plasma simulation; TITANIUM NITRIDE; PLASMA; DC; PACVD; TIN;
D O I
10.1088/1009-0630/12/4/13
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
A self-consistent model was adopted to study the time evolution of low-voltage pulsed DC glow discharge. The distributions of electric field, ion density and electron density in nitrogen were investigated in our simulation, and the temporal shape of the discharge current was also obtained. Our results show that the dynamic behaviors of the discharge depends strongly on the applied pulse voltage, and the use of higher pulse voltages results in a significantly increase of discharge current and a decrease of discharge delay time. The current-voltage characteristic calculated by adjusting secondary electron emission coefficient for different applied pulse voltage under the gas pressure of 1 Torr is found in a reasonable agreement with the experimental results.
引用
收藏
页码:547 / 551
页数:5
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