Millimeter wave detection by thermopile antenna

In this paper a novel MEMS thermopile structure is proposed, which consist of linearly arranged p-and n-type polysilicon strips instead of the conventional loop-like configuration. It is shown that these devices sense the millimeter wave radiation beyond the infrared. The polarity and frequency dependence of the sensitivity prove that these strips behave as absorbing antennas towards the microwave/millimeter wave radiation. The induced current is calculated having a maximum in the geometrical center of the antenna, exactly at the position where the hot end of the thermopair is located. The measured responsitivities to direct heating, infrared radiation, 13 GHz microwave radiation and 100 GHz millimeter-wave radiation are presented. (C) 2010 Published by Elsevoer Ltd.