Strong Ionization Asymmetry in a Geometrically Symmetric Radio Frequency Capacitively Coupled Plasma Induced by Sawtooth Voltage Waveforms

被引：110

作者：

Bruneau, Bastien ^{[1
]}

Gans, Timo ^{[2
]}

O'Connell, Deborah ^{[2
]}

Greb, Arthur ^{[2
]}

Johnson, Erik V. ^{[1
]}

Booth, Jean-Paul ^{[3
]}

机构：

[1] Ecole Polytech, LPICM CNRS, F-91120 Palaiseau, France

[2] Univ York, Dept Phys, York Plasma Inst, York YO10 5DD, N Yorkshire, England

[3] Ecole Polytech, LPP CNRS, F-91120 Palaiseau, France

来源：

PHYSICAL REVIEW LETTERS | 2015年 / 114卷 / 12期

基金：

英国工程与自然科学研究理事会;

关键词：

ION ENERGY; DISCHARGES; ELECTRONS;

D O I：

10.1103/PhysRevLett.114.125002

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The ionization dynamics in geometrically symmetric parallel plate capacitively coupled plasmas driven by radio frequency tailored voltage waveforms is investigated using phase resolved optical emission spectroscopy (PROES) and particle-in-cell (PIC) simulations. Temporally asymmetric waveforms induce spatial asymmetries and offer control of the spatiotemporal dynamics of electron heating and associated ionization structures. Sawtooth waveforms with different rise and fall rates are employed using truncated Fourier series approximations of an ideal sawtooth. Experimental PROES results obtained in argon plasmas are compared with PIC simulations, showing excellent agreement. With waveforms comprising a fast voltage drop followed by a slower rise, the faster sheath expansion in front of the powered electrode causes strongly enhanced ionization in this region. The complementary waveform causes an analogous effect in front of the grounded electrode.

引用

页数：5

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