An application for near-real-time analysis of XPS data

A platform-independent application for the analysis of XPS data has been developed with the goal of providing rapid data processing of survey spectra at a more sophisticated level than is typically performed. This application uses an expert systems approach to invoke a set of rules that are applied to the data. The application then uses simple, automated data analysis calculations to generate information on the thickness of any carbon contamination layer, atomic composition corrected for carbon contamination, and segregation (layering) information as soon as the data are collected. Batch processing and automated report generation are features incorporated into this application that would also improve the throughput for data analysis, resulting in substantial labor reduction and cost savings. Copyright (C) 2010 John Wiley & Sons, Ltd.