An application for near-real-time analysis of XPS data

被引：4

作者：

Lea, A. S. ^{[1
]}

Swanson, K. R. ^{[1
]}

Haack, J. N. ^{[2
]}

Castle, J. E. ^{[3
]}

Tougaard, S. ^{[4
]}

Baer, D. R. ^{[1
]}

机构：

[1] Pacific NW Natl Lab, Environm Mol Sci Lab, Richland, WA 99352 USA

[2] Pacific NW Natl Lab, Natl Secur Directorate, Richland, WA 99352 USA

[3] Univ Surrey, Sch Engn, Fac Engn & Phys Sci, Guildford GU2 7XH, Surrey, England

[4] Univ So Denmark, Inst Chem & Phys, Dept Chem & Phys, DK-5230 Odense M, Denmark

来源：

SURFACE AND INTERFACE ANALYSIS | 2010年 / 42卷 / 6-7期

关键词：

x-ray photoelectron spectroscopy; expert systems; real-time analysis; EXPERT-SYSTEM; CONTAMINATION; ATOMS;

D O I：

10.1002/sia.3304

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A platform-independent application for the analysis of XPS data has been developed with the goal of providing rapid data processing of survey spectra at a more sophisticated level than is typically performed. This application uses an expert systems approach to invoke a set of rules that are applied to the data. The application then uses simple, automated data analysis calculations to generate information on the thickness of any carbon contamination layer, atomic composition corrected for carbon contamination, and segregation (layering) information as soon as the data are collected. Batch processing and automated report generation are features incorporated into this application that would also improve the throughput for data analysis, resulting in substantial labor reduction and cost savings. Copyright (C) 2010 John Wiley & Sons, Ltd.

引用

页码：1061 / 1065

页数：5

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