Aluminum-doped zinc oxide nanorods and methyl alcohol gas sensor application

被引:13
|
作者
Liu, Yi-Hsing [1 ,2 ]
Chang, Shoou-Jinn [1 ,2 ]
Lai, Lin-Tzu [1 ,2 ]
Tu, Yung-Ping [3 ]
Young, Sheng-Joue [3 ]
机构
[1] Natl Cheng Kung Univ, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Dept Elect Engn, Tainan 70101, Taiwan
[3] Natl Formosa Univ, Dept Elect Engn, Huwei Township 632, Yunlin, Taiwan
关键词
ZNO THIN-FILMS; SENSING PROPERTIES; ENHANCEMENT; PERFORMANCE; HYDROGEN;
D O I
10.1007/s00542-020-04856-z
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we mainly discuss about Al-doped zinc oxide (ZnO) nanorods (NRs) grown by hydrothermal method with low temperature. Glass substrate was grown 100 nm ZnO seed layer by RF magnetron Sputter. Add zinc nitrate hexahydrate [Zn(NO3)(2)center dot 6H(2)O] and hexamethylenetetramine (HMT, C6H12N4), and add aluminum nitrate [Al(NO3)(3)center dot 9H(2)O] for changing conductive properties of ZnO NRs to reach the purpose of doped. Then we used field electron emission scanning electron microscope observing the surface morphology; energy dispersive spectrometer analyze element content; X-ray diffractometer; photoluminescence analyze optical properties; transmission electron microscopy view the internal type and structure of the material. Finally observing the Al-doped ZnO NRs and pure ZnO NRs sensor under methyl alcohol surroundings. The results the Al-doped ZnO NRs sensor were found to be more sensitive than the pure ZnO NRs sensor under methyl alcohol surroundings.
引用
收藏
页码:377 / 382
页数:6
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