NanoHand: micro-nano system for automatic handling of nano-objects

被引：1

作者：

Fatikow, S. ^{[1
]}

Eichhorn, V. ^{[1
]}

Sill, A. ^{[1
]}

Steinecker, A. ^{[2
]}

Meyer, C. ^{[2
]}

Occhipinti, L. ^{[3
]}

Fahlbusch, S. ^{[4
]}

Utke, I. ^{[4
]}

Boggild, P. ^{[5
]}

Breguet, J. -M. ^{[6
]}

Kaufmann, R. ^{[7
]}

Zadrazil, M. ^{[8
]}

Barth, W. ^{[9
]}

机构：

[1] OFFIS, Escherweg 2, D-26121 Oldenburg, Germany

[2] CSEM, CH-6055 Alpnach, Switzerland

[3] STMicroelect, I-95121 Catania, Italy

[4] EMPA, CH-3602 Thun, Switzerland

[5] Tech Univ Denmark, MIC, DK-2800 Lyngby, Denmark

[6] Ecole Polytech Fed Lausanne, CH-1015 Lausanne, Switzerland

[7] Klochke Nanotechnik, D-52076 Aachen, Germany

[8] TESCAN, CZ-62300 Brno, Czech Republic

[9] Nascatec, D-70563 Stuttgart, Germany

来源：

OPTOMECHATRONIC MICRO/NANO DEVICES AND COMPONENTS III | 2007年 / 6717卷

关键词：

microrobotics; nanotechnology; carbon nanotubes;

D O I：

10.1117/12.754400

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In the NanoHand project a system consisting of micro/nano based subsystems for automatic handling of nanometer sized objects like carbon nanotubes (CNTs) and nanowires (NWs) will be developed. The goals of the project are driven by the needs of upcoming semiconductor technology. Demonstrators will be built, which have a short term (a) as well as a long term (b) perspective: (a) automated decoration of scanning probe microscope (SPM) probes with (i) CNT-enabled supertips and (ii) supertips grown by focused electron beam induced deposition; (b) handling and assembly of CNTs for the construction of nanoelectronic devices. NanoHand aims to transfer results achieved in laboratories towards industrially applicable, automated handling system for nanoobjects and its applications. This paper reports the technical achievements of the first project year.

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页数：10

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