Self-oscillating tapping mode atomic force microscopy

被引:15
|
作者
Manning, L [1 ]
Rogers, B
Jones, M
Adams, JD
Fuste, JL
Minne, SC
机构
[1] Univ Nevada, Dept Mech Engn, Reno, NV 89557 USA
[2] Univ Nevada, Nevada Ventures Nanosci Program, Reno, NV 89557 USA
[3] Nanodevices Inc, Santa Barbara, CA 93111 USA
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 2003年 / 74卷 / 09期
关键词
D O I
10.1063/1.1602935
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A piezoelectric microcantilever probe is demonstrated as a self-oscillator used for tapping mode atomic force microscopy. The integrated piezoelectric film on the cantilever serves as the frequency-determining component of an oscillator circuit; oscillation near the cantilever's resonant frequency is maintained by applying positive feedback to the film via this circuit. This new mode, which is a step towards more compact and parallel tapping mode AFM imaging, is demonstrated by imaging an evaporated gold film on a silicon substrate. A self-oscillating frequency spectrum and a force-distance curve are also presented. (C) 2003 American Institute of Physics.
引用
收藏
页码:4220 / 4222
页数:3
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