SIMULTANEOUS RESONANCES OF ELECTROSTATICALLY ACTUATED MEMS RESONATORS

被引：0
|
作者：
Caruntu, Dumitru I. [1 ]
Reyes, Christian [1 ]
机构：
[1] Univ Texas Pan Amer, Dept Mech Engn, Edinburg, TX 78539 USA
来源：
PROCEEDINGS OF THE ASME INTERNATIONAL DESIGN ENGINEERING TECHNICAL CONFERENCES AND COMPUTERS AND INFORMATION IN ENGINEERING CONFERENCE, 2014, VOL 8 | 2014年
关键词：
HALF NATURAL FREQUENCY; MICROELECTROMECHANICAL FILTERS; DYNAMICS;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper deals with simultaneous resonance of MEMS cantilever resonator sensors under double electrostatic actuation. The system consists of a MEMS cantilever between two parallel fixed plates. The two frequencies of actuation are one near natural frequency, and the other near half natural frequency. The frequency response of the structure is investigated, and parameter influences reported.
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页数：7
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