Response to "Comment on 'A model of hole trapping in SiO2 films on silicon'" [J. Appl. Phys. 83, 5591 (1998)]

被引:4
|
作者
Lenahan, PM [1 ]
Conley, JF
机构
[1] Penn State Univ, University Pk, PA 16802 USA
[2] Dynam Res Corp, Beaverton, OR 97006 USA
关键词
D O I
10.1063/1.367499
中图分类号
O59 [应用物理学];
学科分类号
摘要
We disagree with the comment of R. A. B. Devine, W. L. Warren, and S. Karna [J. Appl. Phys. 83, 5591 (1998)]. (C) 1998 American institute of Physics.
引用
收藏
页码:5593 / 5594
页数:2
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