CMOS-Compatible High-Q Photonic Crystal Cavities

被引：0

作者：

Dodane, Delphin ^{[1
]}

Bourderionnnet, Jerome ^{[1
]}

Combrie, Sylvain ^{[1
]}

De Rossi, Alfredo ^{[1
]}

机构：

[1] Thales Res & Technol, Campus Polytech,Ave A Fresnel, Palaiseau, France

来源：

2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2018年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

All-Solid Cladding Photonic Crystal Cavities have been fabricated in CMOS foundry. A recent design concept resulted into a measured Q-factor of 0.6 million (4.1 x 10(5) in average). Statistical analysis leads to an estimate of the fabrication disorder of 1.2 nm.

引用

页数：2

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