CMOS-Compatible High-Q Photonic Crystal Cavities

被引：0

作者：

Dodane, Delphin ^{[1
]}

Bourderionnnet, Jerome ^{[1
]}

Combrie, Sylvain ^{[1
]}

De Rossi, Alfredo ^{[1
]}

机构：

[1] Thales Res & Technol, Campus Polytech,Ave A Fresnel, Palaiseau, France

来源：

2018 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2018年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

All-Solid Cladding Photonic Crystal Cavities have been fabricated in CMOS foundry. A recent design concept resulted into a measured Q-factor of 0.6 million (4.1 x 10(5) in average). Statistical analysis leads to an estimate of the fabrication disorder of 1.2 nm.

引用

页数：2

共 50 条

[1] High-Q Photonic Crystal Cavities
Noda, Susumu
2007 CONFERENCE ON LASERS & ELECTRO-OPTICS/QUANTUM ELECTRONICS AND LASER SCIENCE CONFERENCE (CLEO/QELS 2007), VOLS 1-5, 2007, : 1611 - 1611
[2] CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform
Yuta Ooka
Tomohiro Tetsumoto
Akihiro Fushimi
Wataru Yoshiki
Takasumi Tanabe
Scientific Reports, 5
[3] CMOS compatible high-Q photonic crystal nanocavity fabricated with photolithography on silicon photonic platform
Ooka, Yuta
Tetsumoto, Tomohiro
Fushimi, Akihiro
Yoshiki, Wataru
Tanabe, Takasumi
SCIENTIFIC REPORTS, 2015, 5
[4] HIGH-Q CAVITIES IN MULTILAYER PHOTONIC CRYSTAL SLABS
Tomljenovic-Hanic, S.
de Sterke, C. M.
Steel, M. J.
Eggleton, B. J.
Tanaka, Y.
Noda, S.
2008 JOINT CONFERENCE OF THE OPTO-ELECTRONICS AND COMMUNICATIONS CONFERENCE AND THE AUSTRALIAN CONFERENCE ON OPTICAL FIBRE TECHNOLOGY, VOLS 1 AND 2, 2008, : 207 - +
[5] High-Q Photonic Crystal Nanobeam Cavities on Silicon
Shi, Yaocheng
2016 PROGRESS IN ELECTROMAGNETICS RESEARCH SYMPOSIUM (PIERS), 2016, : 3159 - 3159
[6] High-Q cavities in multilayer photonic crystal slabs
Tomljenovic-Hanic, Snjezana
de Sterke, C. Martijn
Steel, M. J.
Eggleton, Benjamin J.
Tanaka, Yoshinori
Noda, Susumu
OPTICS EXPRESS, 2007, 15 (25): : 17248 - 17253
[7] High-Q CMOS-compatible micromachined edge-suspended spiral inductors
Hon, WC
Zhang, JW
Leung, LLW
Chen, KJ
2004 IEEE RADIO FREQUENCY INTEGRATED CIRCUITS (RFIC) SYMPOSIUM, DIGEST OF PAPERS, 2004, : 263 - 266
[8] Design of a high-Q CMOS-compatible MEMS tunable capacitor for RF applications
Nasirzadeh, N
Abbaspour, E
Dadashzadeh, G
THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICRO-ELECTRONICS AND MICRO-SYSTEMS, 2005, : 335 - 337
[9] High-Q aluminum nitride photonic crystal nanobeam cavities
Pernice, W. H. P.
Xiong, C.
Schuck, C.
Tang, H. X.
APPLIED PHYSICS LETTERS, 2012, 100 (09)
[10] High-Q photonic crystal cavities with embedded quantum dots
Hennessy, K
Reese, C
Badolato, A
Imamoglu, A
Petroff, PM
Hu, EL
QUANTUM SENSING AND NANOPHOTONIC DEVICES, 2004, 5359 : 210 - 219

← 1 2 3 4 5 →