APPLICATIONS OF THE LTCC CERAMICS IN MICROPLASMA SYSTEMS

被引：1
|
作者：
Macioszczyk, Jan [1 ]
Golonka, Leszek [1 ]
机构：
[1] Wroclaw Univ Sci & Technol, Fac Microsystent Elect, Wybrzeie Wyspianskiego 27, PL-50370 Wroclaw, Poland
来源：
METROLOGY AND MEASUREMENT SYSTEMS | 2019年 / 26卷 / 04期
关键词：
microplasma; Low-Temperature Co-fired Ceramics; microsystems; TEMPERATURE; MICRODISCHARGE; DISCHARGE;
D O I：
10.24425/mms.2019.130564
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In this paper the current status of microplasma devices and systems made in the LTCC technology is presented. The microplasma characteristics and applications are described. We discuss the properties of the LTCC materials, that are necessary for reliable operation of the sources. This material is well known for its good reliability and durability in harsh conditions. Still, only a few examples of such microplasma sources are described. Some of them have been developed by the authors and successfully used for chemical analysis and synthesis.
引用
收藏
页码：713 / 724
页数：12
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