Silicon based micromachining technology for advanced microwave and millimeter wave applications

被引：0
|
作者：
Grenier, K [1 ]
Pons, P [1 ]
Parra, T [1 ]
Graffeuil, J [1 ]
Plana, R [1 ]
机构：
[1] CNRS, LAAS, F-31077 Toulouse 04, France
来源：
2000 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, CAS 2000 PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper outlines the capabilities of the silicon micromachining for the realization of passive elements featuring high performances. We also presents the design method that have to be invoked in order to get good results in a very short time.
引用
收藏
页码：433 / 436
页数：4
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