Silicon based micromachining technology for advanced microwave and millimeter wave applications

被引：0
|
作者：
Grenier, K [1 ]
Pons, P [1 ]
Parra, T [1 ]
Graffeuil, J [1 ]
Plana, R [1 ]
机构：
[1] CNRS, LAAS, F-31077 Toulouse 04, France
来源：
2000 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, CAS 2000 PROCEEDINGS | 2000年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper outlines the capabilities of the silicon micromachining for the realization of passive elements featuring high performances. We also presents the design method that have to be invoked in order to get good results in a very short time.
引用
收藏
页码：433 / 436
页数：4
相关论文
共 50 条
  • [1] Silicon micromachining for millimeter-wave applications
    Guillon, B
    Grenier, K
    Pons, P
    Cazaux, JL
    Lalaurie, JC
    Cros, D
    Plana, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (02): : 743 - 745
  • [2] ADVANCED CHANNELIZATION TECHNOLOGY FOR RF, MICROWAVE, AND MILLIMETER-WAVE APPLICATIONS
    ANDERSON, GW
    WEBB, DC
    SPEZIO, AE
    LEE, JN
    PROCEEDINGS OF THE IEEE, 1991, 79 (03) : 355 - 388
  • [3] Irradiated Silicon for Microwave and Millimeter Wave Applications
    Krupka, Jerzy
    Salski, Bartlomiej
    Karpisz, Tomasz
    Kopyt, Pawel
    Jensen, Leif
    Wojciechowski, Marcin
    IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, 2022, 32 (06) : 700 - 703
  • [4] Silicon based microwave and millimeter wave sources indigenous technology development
    Ahmad, S
    IETE JOURNAL OF RESEARCH, 1997, 43 (06) : 453 - 472
  • [5] GaN Technology for Microwave and Millimeter Wave Applications
    Kolias, Nicholas J.
    Whelan, Colin S.
    Kazior, Thomas E.
    Smith, Kurt V.
    2010 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST (MTT), 2010, : 1222 - 1225
  • [6] Millimeter-Wave Planar Antenna Array Based on Modified Bulk Silicon Micromachining Technology
    Liu, Peiqin
    Li, Yue
    Wang, Shaodong
    Zhang, Zhijun
    IEEE TRANSACTIONS ON ANTENNAS AND PROPAGATION, 2020, 68 (11) : 7676 - 7681
  • [7] GaAs micromachining for millimeter wave applications
    Müller, A
    Constantinidis, G
    Neculoiu, D
    Vasilache, D
    Lagadas, M
    Deligeorgis, G
    Iordanescu, S
    CAS: 2002 INTERNATIONAL SEMICONDUCTOR CONFERENCE, VOLS 1 AND 2, PROCEEDINGS, 2001, : 25 - 28
  • [8] ADVANCED III-V HEMT TECHNOLOGY FOR MICROWAVE AND MILLIMETER-WAVE APPLICATIONS
    LONG, AP
    EDDISON, IG
    MICROELECTRONIC ENGINEERING, 1992, 19 (1-4) : 389 - 396
  • [9] Suspended substrate technology for microwave and millimeter wave applications
    Koul, Shiban K.
    IETE Journal of Research, 1988, 34 (02) : 125 - 140
  • [10] Silicon MEM technology for millimeter-wave applications
    Grenier, K
    Dubuc, D
    Pons, P
    Plana, R
    Rabbia, L
    Parra, T
    Graffeuil, J
    MEMS DESIGN, FABRICATION, CHARACTERIZATION, AND PACKAGING, 2001, 4407 : 230 - 240
12345